Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope

Nanolithography and manipulation of graphene using an atomic force microscope

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides ox...

Combined laser and atomic force microscope lithography on aluminum: Mask fabrication for nanoelectromechanical systems

Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. LAO through the non-contact mode o...

Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography.

A process for fabricating dense graphene nanoribbon arrays using self-assembled patterns of block copolymers on graphene grown epitaxially on SiC on the wafer scale has been developed. Etching masks comprising long and straight nanoribbon array structures with linewidths as narrow as 10 nm were fabricated, and the patterns were transferred to graphene. Our process combines both top-down and sel...

Fabrication of Nanoelectrodes by Cutting Carbon Nanotubes Assembled by Di-Electrophoresis Based on Atomic Force Microscope

Presented is a new fabrication method for CNT (Carbon NanoTubes) nanoelectrode pairs by combining the DEP (Di-electrophoresis) and AFM (Atomic Force Microscope) lithography. The single CNT is driven and electrically connected with the microeletrodes by the DEP force,then cut into nanoeletrode pairs with AFM tip. The fabricated CNT nanoeletrode pairs can be used as probes to detect species in mi...